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Journal of Microelectromechanical Systems is a peer-reviewed journal published by IEEE, covering Advanced MEMS and NEMS Technologies, Mechanical and Optical Resonators, Acoustic Wave Resonator Technologies. Over its lifetime it has published 4,634 papers, which have received 179,650 citations.
| Publisher | IEEE |
|---|---|
| Reference style | Numbered (IEEE) Numbered — [1], [2] in the text [1] A. Smith, B. Jones, and C. Lee, "A representative article title," Journal of Microelectromechanical Systems, vol. 12, no. 3, pp. 45–58, 2023.
Formats any DOI in Journal of Microelectromechanical Systems style. No sign-up. |
| Abbreviation (ISO-4) | JMEMS |
| Publishes research in | Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Acoustic Wave Resonator Technologies Force Microscopy Techniques and Applications Advanced Sensor and Energy Harvesting Materials |
| ISSN | 1057-7157 |
| Citation impact (2-yr) | 2.15 |
| h-index | 173 |
| i10-index | 2,896 |
| Top institutions publishing here | University of Michigan |
| Journal website | ieeexplore.ieee.org |
| You get | A submission-ready PDF and the editable LaTeX source — ready to submit. |
Citations each year’s papers have accumulated so far — the most recent years are still building up.
The Young's modulus ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">E</i> ) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of <i…
Reports the completion of four fundamental fluidic operations considered essential to build digital microfluidic circuits, which can be used for lab-on-a-chip or micro total analysis system (μTAS): 1) creating, 2) transporting, 3) cutting, and 4) merging liquid droplets, all by electrowetting, i.e., controlling the wetting property of the surface through electric potential. The surface used…
A three-dimensional serpentine microchannel design with a "C shaped" repeating unit is presented in this paper as a means of implementing chaotic advection to passively enhance fluid mixing. The device is fabricated in a silicon wafer using a double-sided KOH wet-etching technique to realize a three-dimensional channel geometry. Experiments using phenolphthalein and sodium hydroxide solutions…
This paper describes a fabrication technique for building three-dimensional (3-D) micro-channels in polydimethylsiloxane (PDMS) elastomer. The process allows for the stacking of many thin (less than 100-/spl mu/m thick) patterned PDMS layers to realize complex 3-D channel paths. The master for each layer is formed on a silicon wafer using an epoxy-based photoresist (SU 8).…
Samples of 53 materials that are used or potentially can be used or in the fabrication of microelectromechanical systems and integrated circuits were prepared: single-crystal silicon with two doping levels, polycrystalline silicon with two doping levels, polycrystalline germanium, polycrystalline SiGe, graphite, fused quartz, Pyrex 7740, nine other preparations of silicon dioxide, four preparations of silicon…
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