Continuous rapid shrinking of feature size made the authorities to seek alternative patterning methods as the conventional photolithography comes with its intrinsic resolution limit. In this regard, some promising techniques have been proposed as next-generation lithography (NGL) that has the potentials to achieve both high-volume production and very high resolution. This article reviews the promising…
Nanomanufacturing and Metrology Template
Write in a clean editor, then format for Nanomanufacturing and Metrology in one click — DocuGuru applies the official Springer Nature template with superscript references and exports a submission-ready PDF plus the editable LaTeX source. Free to start.
About the Nanomanufacturing and Metrology format
Nanomanufacturing and Metrology is a peer-reviewed journal published by Springer Nature, covering Advanced Surface Polishing Techniques, Advanced Measurement and Metrology Techniques, Advanced machining processes and optimization.
| Publisher | Springer Nature |
|---|---|
| Reference style | Superscript numbered (Nature) Superscript — small raised numerals in the text 1. Smith, A., Jones, B. & Lee, C. A representative article title. Nanomanufacturing and Metrology 12, 45–58 (2023).
Formats any DOI in Nanomanufacturing and Metrology style. No sign-up. |
| Publishes research in | Advanced Surface Polishing Techniques Advanced Measurement and Metrology Techniques Advanced machining processes and optimization Force Microscopy Techniques and Applications Optical measurement and interference techniques |
| ISSN | 2520-811X |
| Citation impact (2-yr) | 6.4 |
| h-index | 32 |
| i10-index | 127 |
| Total citations | 3,934 |
| Article processing charge | $2,090 |
| Top institutions publishing here | Tianjin University |
| Journal website | www.springer.com |
| You get | A submission-ready PDF and the editable LaTeX source — ready to submit. |
Papers published in Nanomanufacturing and Metrology per year
Citation impact of Nanomanufacturing and Metrology by publication year
Citations each year’s papers have accumulated so far — the most recent years are still building up.
Most-cited papers in Nanomanufacturing and Metrology
Abstract Atomic layer deposition (ALD) is a thin-film fabrication technique that has great potential in nanofabrication. Based on its self-limiting surface reactions, ALD has excellent conformality, sub-nanometer thickness control, and good process compatibility. These merits promote the industrial and research applications of ALD in various fields. This article provides an introduction to ALD and highlights…
Abstract Femtosecond laser fabrication has grown to be a major method of extreme manufacturing because of the extreme energy density and spatial and temporal scales of femtosecond lasers. The physical effects and the mechanism of interaction between femtosecond lasers and materials are distinct from those in traditional processes. The nonlinear and nonequilibrium effects of the…